The polishing process section of the integrated circuit ultra-pure water preparation system provides a guaranteed environment for micro-pollution control.In the trace pollution con-trol environment,a multiphase catalytic system of metal nanoparticles for hydrogen-oxygen syn-thesis reaction,represented by palladium group,can realize the combined reduction and removal of multiple micro-pollutants,and then meet the control requirements of dissolved gas and trace oxidi-zer in the 3nm process ultra-pure water preparation system.In this paper,four reaction mecha-nisms and catalytic mechanisms of hydrogen and oxygen synthesis reactions were systematically de-scribed and summarized,the close influence of metal surface structure,active site,morphology and size,carrier properties,liquid phase reaction environment and alloy components on catalytic char-acteristics(activity and selectivity)of each reaction path was emphatically discussed,and formed the boundary conditions of hydrogen oxidation reaction in clean water phase.It has guiding signifi-cance for the application research of metal nanoparticles in the field of ultra-pure water.
关键词
超纯水/微污染控制/金属纳米粒子/催化反应活性/选择性
Key words
Ultra pure water/Micropollution control/Metal nanoparticles/Catalytic activity/Selectivity
维普
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