Study on High Precision Thin Film Temperature Sensor Based on Multi-node Array Structure
A new micro-electro-mechanical system(MEMS)thin-film temperature sensor is proposed for the intelligent sensing in hydraulic systems,which has a small size and high temperature measurement accuracy to realize the accurate sensing of fluid temperature signals.A new temperature measurement material system based on polymer-metal-ceramic materials is developed.At the same time,a multi-node three-dimensional array electrode structure is innovatively proposed.For the problem of deposition of thermoelectric thin films on three-dimensional curved polymer substrates,the graphical transfer of thin films on curved substrates is realized based on MEMS magnetron sputtering technology.The test results show that the prepared multi-node type thin film temperature sensor can achieve a sensitivity factor of 42 μV/℃ in the range of-60-200 ℃,a temperature time drift rate of 0.012 ℃/min,a repeatability error of 0.32％,a maximum hysteresis of 1.3％and a full scale error of less than 0.5％FS in the static test from-60-100 ℃.In the comprehensive performance test,the sensor still has a high temperature resolution under the impact of high-speed hot airflow,and can work normally for a long time in different working materials for more than 24 h,which can meet the demand of temperature measurement for a long time to maintain the sealability and stability in the actual hydraulic system.
hydraulic systemthin film thermocouplemulti-node structurecurved thin film formationperformance study
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