Optimal Design and Analysis of Ultra-flat Adsorption Loading for Planar Optical Components
In the processing and application of flat optical components,vacuum adsorption loading has the advantages of fast and stable.However,the influence of vacuum adsorption on the surface shape of flat optical components cannot be ignored.Based on the finite element analysis method,the airway of the vacuum sucker is optimized for special requirements such as functional window limitation and inverted loading.Meanwhile,the actual effect of vacuum sucker is analyzed through experiments.The experimental results show that when the vacuum sucker is not locked,the surface PV(Peak to Valley)at the substrate center,within the range of Φ10 mm、Φ20 mm and Φ40 mm,are 1.2 nm,5.1 nm and 20.8 nm,respectively.On this basis,the effects about the flatness of the loading platform,the loading method of the suction cup and the locking force of the suction cup on the adsorption effect are further analyzed.The results show that the surface PV of the flat optical element decreases with the increase of the flatness of the loading platform;When the flatness of the loading platform is 2 μm,four screws and 2.5 N·m torque are used to fix the edge,and the adsorption result is the best;In the center range of Φ10 mm,Φ20 mm and Φ40 mm,the mean surface PV are 7.8 nm,27.7 nm and 114.2 nm,respectively,and the loading repeatability standard deviations are 0.93 nm,3.2 nm and 10.6 nm.
vacuum adsorptionairway optimizationfinite element analysisoptical surface measurementtorque control
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