Regarding the fatigue problem of compliant mechanisms arising from the cyclic stress of viscous-slip motion,a low-stress,high-resolution,decoupled two-degree-of-freedom macro stroke positioning platform is designed.Bionic flexible hinges with double circular arcs are used in designing the compliant driving unit,thus reducing stress and improving structural stiffness.Then,piezoelectric stick-slip driving is combined with the orthogonal guidance mechanism to realize the platform's high-resolution,large-stroke two-dimensional parallel decoupled motion.After that,the finite element method and pseudo-rigid body model are used to analyze the positioning platform statically and dynamically,and the platform stress,frequency,and single-step displacement are simulated by ANSYS Workbench software.Finally,the experimental platform is built,and performances are tested.The experimental results show that the maximum velocity of the platform is 9.03 mm/s,the x-andy-directional displacement coupling rate is 0.89％and 0.92％,the resolution is 10 nm and 11 nm,and the maximum horizontal and vertical load capacity is 1.4 N and 40 N.The validity of the structural design and theoretical model is verified by experimental results.
piezoelectric actuationstick-slip motionlow stresscompliant mechanismtwo degrees of freedom
万方数据
维普
