A Review of Burr Research of Microstructures in Micro Cutting
With the rapid development of micro/nano fabrication,the microstructures of products in the medical,electronic and energy fields are becoming more and more complex and require higher precision,while the microstructures are prone to burrs in the cutting process,which greatly restricts the quality and performance of the products.Starting from the formation of burrs during the cutting of microstructures,the research status of the microstructure burr formation mechanism is discussed,and the prediction and characterization methods of microstructure burr size are introduced.The influence of factors such as cutting parameters,process planning,tool design and material modification on burr size is analyzed,and the burr control methods are summarized.The microstructure burr removal methods are classified,and the burr removal methods and effects of different microstructures are reviewed,the bottleneck problems in the removal of microstructure burrs are discussed,and the development trend of microstructure burr removal methods is pointed out.