Fundamental Research on Laser-micro Milling Hybrid Processing of Alumina Co-fired Substrate
Based on the difficult processing problem of Al2O3 HTCC,a hybrid processing method of laser-micro milling is proposed.The morphology,dimensions and mechanical properties of the residual metamorphic layer of nanosecond laser-machined aluminum oxide co-fired substrates are investigated followed by milling tests.The results show that the tightly bound alumina particles form a loose metamorphic layer attached to the substrate surface under laser action.The etching depth of the grooves increases with the increase of laser power and the decrease of scanning speed and filling spacing in different degrees between 170-537 μm,167-493 μm and 170-303 μm,respectively,while the etching width varies between 515-643 μm.The overall hardness of the residual metamorphic layer of the substrate after laser modification was reduced by 82％-96.2％down to 53.9 HV.Compared to pure milling,the laser-micro-milling resulted in improved tool serviceability,largely intact cutting edges and tool profiles,and a reduction in the post-processing surface roughness by 60％-65％down to 0.204 μm.
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