Design and Precision Analysis of High-precision Triangular Prism Standard Device for Coordinate Unification
In order to solve the problem of high-precision measurement of micro-devices with complex features such as deep holes,micro-grooves and curved surfaces,it is necessary to use micro-nano contact probes and white light interference probes for composite measurement.In the composite measurement system composed of these two probes,the existing standard instrument cannot unify the coordinates with high precision.Therefore,according to the measurement principle of the two probes,a triangular prism standard is proposed to achieve coordinate unification.According to the structural features of the triangular prism standard,based on the geometric principle,a mathematical model of the influence of the geometric parameters of the standard and its flatness on the coordinate accuracy of the reference point is established.According to the mathematical model,the numerical simulation is carried out,and the influence of the geometric error of the standard on the accuracy of the reference point is further analyzed,which provides the design basis for the parameter design of the standard.Finally,the unified experiment and accuracy analysis of the probe coordinate system of the micro-nano coordinate measuring machine and the white light interferometer are carried out by using the designed and processed standard.The results show that the coordinate unification of the contact probe and the white light interference probe can be realized by using the high-precision triangular prism standard,and the coordinate unification registration accuracy can reach 2.259 μm.This method provides a reference for the design and analysis of the standard in composite measurement.
standard devicecoordinate unificationcomposite measurementmicro-nano contact probewhite light interferometer microscope
万方数据
维普
