Study of Surface Mechanical Properties of Magnetron Sputtered MoS2-Ti Thin Films
In order to achieve the optimal control of the surface mechanical properties of magnetron sputtered thin films,the magnetron sputtering test was carried out with 42CrMo material.Based on the test data,the influence of processing parameters on surface mechanical properties and the significance analysis of processing parameters are discussed;the prediction model between processing parameters and evaluation indexes is constructed by the response surface method and examined and analysed;finally,the processing parameter combinations when the mechanical properties are optimal are analysed by the main effect.The results show that with the gradual increase of sputtering power,deposition temperature and deposition air pressure,the residual stress and hardness on the surface of the specimen show a tendency of increasing and then decreasing.The contribution of deposition temperature to residual stress is the largest,followed by sputtering power,and deposition air pressure is the smallest;the contribution of sputtering power to hardness is the largest.followed by deposition temperature,and deposition air pressure is the smallest.The prediction model correlation coefficient and adjustment correlation coefficient are above 90％,which proves the accuracy of constructing the prediction model.
NETL
NSTL
万方数据
