背钝化自动上下料机稳定性分析及优化设计
Stability Analysis and Optimization Design of Back Passivation Automatic Loader & Unloader Equipment
穆星泽 1王志宏1
作者信息
- 1. 中国电子科技集团公司第二研究所,山西 太原 030024
- 折叠
摘要
背钝化自动上下料机的稳定性指标主要体现在开机率、硅片卡堵次数及硅片碎片率上.基于此,分析了影响设备稳定运行的因素,通过对设备结构及流程优化设计,有效提升了设备的稳定性,降低了设备碎片率和卡堵次数,提升了设备的开机率,为客户创造了可观的经济效益.
Abstract
The stability index of the back passivation automatic loading and unloading machine is mainly reflected in the operation rate,the number of stuck times during silicon wafer transmission and the silicon chip fragmentation rate.This paper analyzes the factors that affect the stable operation of the equipment.Through the optimized design of the equipment structure and the optimized design of the equipment operation process,the stability of the equipment is improved,and considerable economic benefits are brought to the customers.
关键词
背钝化自动插片机/设备稳定性/硅片/搬近组件Key words
back passivation automatic loader & unloader machine/equipment stability/slilcon wafers/relocated modules引用本文复制引用
出版年
2024
NETL
NSTL
万方数据