Stability Analysis and Optimization Design of Back Passivation Automatic Loader & Unloader Equipment
The stability index of the back passivation automatic loading and unloading machine is mainly reflected in the operation rate,the number of stuck times during silicon wafer transmission and the silicon chip fragmentation rate.This paper analyzes the factors that affect the stable operation of the equipment.Through the optimized design of the equipment structure and the optimized design of the equipment operation process,the stability of the equipment is improved,and considerable economic benefits are brought to the customers.
back passivation automatic loader & unloader machineequipment stabilityslilcon wafersrelocated modules
NETL
NSTL
万方数据
