A Kind of Alignment Welding Jig for Semiconductor Base Block
MGS base block as the semiconductor integrated gas transmission in the bottom of the integrated module parts,MGS base block has a gas channel,the processing of the gas channel hole end face needs to be welded with the plug cap sealing,MGS base block and the plug cap welded coaxiality is required to be within 0.05 mm,in order to ensure that the positioning accuracy of the MGS base block collocation and the use of the performance of the MGS base block.In order to improve the welding quality and the welding process by the precision of the parts affected by the weld quality instability and other issues,the design of a semiconductor base block of the alignment welding tooling,used to ensure the quality of the weld and welding precision.
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