Research on the Control of Reciprocating Motion in Flexible Stage Based on Motion Planning
Flexible stage is a high-speed and precise motion stage.Due to the presence of flexible hinges,significant non-linearities arise,which traditional PID control algorithms struggle to fully address,affecting the tracking accuracy of the flexible stage during reciprocating motion.Consequently,a method combining third-order S-planning with active disturbance rejection control(ADRC)is proposed.The key to this method is the introduction of motion planning,which smoothens the system input signal,not only allowing for stable transitions at rapidly changing points but also enhancing the system's stability.Simultaneously,ADRC control utilizes the estimation and compensation capabilities of the extended state observer(ESO),effectively neutralizes the impact of non-linearities on the system,further improving the tracking performance and accuracy of the motion stage.This approach can effectively handle various uncertainties and external disturbances,enhancing the system's stability and control performance.Lastly,the method is validated through a reciprocating motion experiment with a 150 μm travel distance.Under the same conditions of employing third-order S-planning,PID control performs poorly due to the system's non-linearity;ADRC enhanced the system's estimation and compensation capabilities,achieving precise positioning.Compared to PID,ADRC reduces the maximum tracking error in 50 Hz reciprocating motion by 42.1%,and in 75 Hz reciprocating motion by 38.3%.
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