Research on Thrust Ripple Compensation of Macro-micro Composite Platform Based on Disturbance Observer
The macro-micro composite platform mostly uses a linear motor as a macro-motion stage,and the thrust ripple of the linear motor is an inherent property of the linear motor,which will affect the positioning accuracy of the entire macro-micro composite platform and the macro-micro switching start-up stroke.In order to reduce the positioning error between the starting stroke of the micro-motion stage and the positioning error of the macro-micro composite platform,the fuzzy feedforward control method is used to reduce the positioning error of the macro-motion stage and the starting stroke of the micro-motion stage.On this basis,the thrust ripple of the linear motor of the macro-motion stage is compensated by the disturbance observer(DOB),and the influence of the macro-micro switching start-up stroke and the positioning accuracy of the macro-micro platform before and after compensation is studied.The simulation shows that the use of DOB to compensate the thrust ripple of the macro-motion stage can reduce the motion stroke of the micro-motion stage by 200 nm during the macro-micro start-up,and can reduce the positioning error of the macro-micro composite motion platform by 150 nm.Experiments show that compensating the thrust ripple of the macro-motion stage will reduce the starting stroke of the micro-motion stage by 300 nm during the macro-micro switching,reduce the positioning error of the macro-micro composite platform by 150 nm,and reduce the time of entering the 1μm error band by 0.014 s.It shows that using DOB to compensate the thrust ripple can improve the performance of the macro-micro composite platform.
万方数据
维普
