Inner Loop Damping and Iterative Learning Control of a Large Stroke Micro-positioning Stage Driven by Push-pull Electromagnetic Actuators
In order to solve the problems of small driving force and low damping resonance of the flexure micro-positioning stage driven by voice coil motors(VCM),a push-pull mode of VCMs on both sides is adopted to enhance the driving force,and the inner loop damping controller combined with iterative learning control(ILC)method is used to realize the precise control of the stage.Firstly,a micro-positioning stage of compound parallelogram flexure mechanism driven by dual VCMs with complementary configuration is built.Secondly,an inner loop damping speed feedback controller is designed.Then,the inverse model ILC method is used to eliminate the periodic interference and error.Finally,the tracking experiment is carried out.The results show that when tracking the sine wave of 1 Hz and 2.5 Hz,the maximum error is reduced by 74.6%and 68.6%respectively compared with PI control,which meets the requirements of precise control of the micro-positioning stage.
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