康铜薄膜测力传感器的模型设计
Design of a Constantan Thin Film Sensor Model for Measuring Force
李学瑞 1武文革 1成云平 1李琦1
作者信息
- 1. 中北大学机械工程与自动化学院,山西太原030051
- 折叠
摘要
设计了一种康铜薄膜传感器模型,该模型由硬质合金基体、硬质合金弹性膜片、Al2O3薄膜及康铜薄膜电阻栅构成,为了获得较好的输出电压,康铜薄膜电阻栅与导线连接组成惠斯通电桥.使用有限元分析软件ANSYS对该模型进行了仿真分析,通过改变弹性膜片厚度与所受载荷大小,来比较传感器的不同输出电压,分析结果表明:电阻栅置于弹性膜片最大变形处即中心处,传感器输出灵敏度较高;在相同条件下传感器的输出电压随载荷增加而增加,随着弹性膜片厚度的减小而增大,变化近似呈线性关系.
Abstract
A constantan thin film sensor model is designed.The device consists of hard alloy substrate,hard alloy elastic diaphragm,Al2O3 film and constantan film resistance gates.In order to obtain better output voltage,the thin-film piezoresistors and wires are arranged in the wheatstone bridge configuration.Using ANSYS to simulate the model,and contrasting the output voltage through changing thickness of the elastic diaphragm and the load size,the results show that:the resistance gates are placed in the position of the maximum deformation of the elastic diaphragm (the center of the elastic diaphragm),the sensor is high sensitivity; under the same condition,the sensor output voltage are increasing with the load increasing and increasing with the decreasing of the elastic diaphragm thickness,and the change is approximated as a linear relationship.
关键词
康铜薄膜/弹性膜片/传感器/有限元分析Key words
Constantan Thin-Film/Elastic Diaphragm/Sensor/FEA引用本文复制引用
基金项目
山西省同国留学人员科研资助项目(2013-086)
中北大学校基金资助项目(20110203)
出版年
2014
NETL
NSTL
维普
万方数据