Base Excitation Method for MEMS Microstructure Driven by Piezoelectric Ceramics
The development status of the base excitation method with PZT was introduced,and the problems existing in specific implementation methods were summarized.The PZT will be subjected to a transverse shearing force during the working process,re-sulting in damage to the PZT.The repeated deformation of the elastic base will cause the microstructure to fall off.A point-contact-ed movable base structure consisting of an upper connecting block with spherical crown grooves and a lower connecting block with spherical crown protrusions was designed.The elastic base with a cylindrical mounting body and three mounting arms was also de-signed.The base excitation device with PZT was fabricated.The dynamic testing system for microstructures was developed.The dy-namic characteristics of two kinds of microstructures were tested.The results show that the improved base excitation device with PZT can effectively excite the microstructures.
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