压电陶瓷驱动的MEMS微结构底座激励方法研究
Base Excitation Method for MEMS Microstructure Driven by Piezoelectric Ceramics
佘东生 1陈亚男 1田江平2
作者信息
- 1. 渤海大学控制科学与工程学院,辽宁 锦州 121013
- 2. 大连理工大学能源与动力学院,辽宁 大连 116023
- 折叠
摘要
介绍了基于压电陶瓷底座激励方法的发展现状,总结了激励方法在具体实现方式上存在的问题.压电陶瓷在工作过程中会受到横向剪切力作用,导致压电陶瓷的损坏;弹性底座反复变形会导致微结构脱落.设计了一种由带有球冠状凹槽的上联接块和带有球冠状凸起的下联接块组成的点接触式可动底座结构,并设计了一种由圆柱安装体和三个安装臂组成的弹性底座,制作了基于压电陶瓷的底座激励装置,搭建了微结构动态特性测试系统,并对两种微结构的动态特性进行了测试实验,结果表明改进后的压电陶瓷底座激励装置可以有效的实现对微结构的激励.
Abstract
The development status of the base excitation method with PZT was introduced,and the problems existing in specific implementation methods were summarized.The PZT will be subjected to a transverse shearing force during the working process,re-sulting in damage to the PZT.The repeated deformation of the elastic base will cause the microstructure to fall off.A point-contact-ed movable base structure consisting of an upper connecting block with spherical crown grooves and a lower connecting block with spherical crown protrusions was designed.The elastic base with a cylindrical mounting body and three mounting arms was also de-signed.The base excitation device with PZT was fabricated.The dynamic testing system for microstructures was developed.The dy-namic characteristics of two kinds of microstructures were tested.The results show that the improved base excitation device with PZT can effectively excite the microstructures.
关键词
激励方法/压电陶瓷/底座结构/动态特性测试Key words
Excitation Method/Piezoelectric Ceramics/Base Structure/Dynamic Characteristic Testing引用本文复制引用
基金项目
辽宁省自然科学基金资助计划(2019-MS-007)
国家自然科学基金面上项目(52071064)
出版年
2024
NETL
NSTL
万方数据