Quickly Exploring the Magnetic Field Distribution of the Cathode Target Based on the Magnetic Powder Pattern Method and Ansoft-Maxwell Simulation Method
The position,distribution and size of the permanent magnets in the planar cathode target were determined by the mag-netic powder pattern method combined with a small number of measured values of the magnetic field.Combined with other main structural parameters of the cathode target,the calculation model of the cathode target was further established.The Ansoft-Maxwell software was used to simulate the size of the magnetic field and the distribution and change of the magnetic field vector of the entire cathode target,the important section and the important path.The magnetic field components of the important path on the surface of the target were measured with a Gauss meter in different directions.The error between the simulated value and the measured value of the target surface magnetic field is within 5%,which further shows that the magnetic particle method com-bined with magnetic field simulation can predict the magnetic field distribution of the unknown planar magnetron sputtering cath-ode target accurately and quickly.
Magnetic Particle MethodAnsoft-MaxwellMagnetic Field DistributionSimulationCathode Target
NETL
NSTL
万方数据
维普
