Motion Planning and Compliance Control Method for Direct Drive Vacuum Manipulator
Semiconductor intelligent manufacturing involves many disciplines and technologies,among which motion planning and compliance control are the foundation and focus of semiconductor intelligent robotics research.In this paper,aiming at the special work-ing environment of the M AG8 vacuum manipulator independently developed by SIASUN,and the easy wafer fall-off,the research on the motion planning and compliance control of the manipulator has been completed.Firstly,its mechanical structure and motion mode are briefly introduced,which can realize the lifting,rotation and telescopic actions of both arms.Secondly,the modify denavit harten-ber method is proposed to analyze the motion planning,and the motion relationship description model of each connecting rod of the ris-ing shaft and telescopic shaft of the direct drive vacuum manipulator is established.Then,the mechanical transmission structure rela-tionship of direct drive vacuum manipulator is analyzed,the torque value of each joint is calculated by Newton Euler method,the com-pliance control problem of manipulator is solved,and the equation for analyzing the torque transmission relationship of each joint is es-tablished.The validity of the forward and inverse kinematics process is proved by the simulation results of the vacuum manipulator.The homogeneous transformation matrix can realize the coordinate transformation of MAG8 moving parts and most industrial robots,and can be used for the trajectory planning of MAG8.The theoretical torque value is compared with the actual torque value of the method pro-posed in this paper,which lays a foundation for the physical platform operation of compliance control.
Vacuum ManipulatorKinematic ModelingDynamic ModelingServo SystemMotor Control
万方数据
维普
