A high-precision eddy current displacement sensor for space application is developed to meet the demand of precision non-contact displacement measurement for ultra-quiet-stable device.Based on the working principle of sensor,the impedance model of the sensor coil is established,and the natural nonlinear characteristic is analyzed.Based on the high-precision balanced-bridge circuit,a nonlinear calibration method is proposed.Without extra cali-brating circuit,the nonlinearity of sensor is reduced from 12％to 0.98％,by the design of balanced-bridge circuit impedance and demodulation phase.The measurement results show that the nonlinearity of high-precision eddy cur-rent displacement sensor is 0.98％in the measurement range of±3mm.And the sensor has already been used in space application.
space applicationeddy currentdisplacementsensornonlinearity
维普
万方数据
