碳化硅单晶微管道缺陷测试研究
Study on The Measurement of Micropipes in SiC Crystals
摘要
本文着重研究了SiC晶体微管道测量的两种方法,即KOH腐蚀法和不腐蚀测试法,并对方法及其测量结果进行比较分析,实现对SiC单晶微管道缺陷这一表征SiC单晶质量的重要参数的快速准确的测量。
Abstract
This article focuses on the studies of two test methods of micropipes in SiC crystals, namely using KOH etching or not. And a comparative analysis of the methods and results was made in this article. The fast and accurate measurement of the density of mic
关键词
SiC/微管道/伯格斯矢量/腐蚀Key words
SiC/Micropipe/Burgers vector/Etching引用本文复制引用
出版年
2011
NETL
NSTL
万方数据