摘要
金刚石除具有宝石属性外,还是一种集声、光、热、力、电、量子等众多优异性能于一身的多功能超极限材料,被赋予"钻石恒久远""工业的牙齿""终极半导体"等众多美誉,有着很高的商业价值、工业价值和科研价值.化学气相沉积(Chemical Vapor Deposition,CVD)技术的发展,极大地拓展了金刚石材料的应用领域,为激活金刚石的各项终极潜能提供了基础.近年来,大尺寸、高质量、低成本、多样式的CVD金刚石材料不断被开发,终端应用场景已经从早期的工具级逐渐拓展至装饰、热学、光学,甚至半导体等高端领域,并且呈小幅井喷的态势.围绕CVD金刚石材料的研究与应用现状展开梳理,介绍CVD金刚石生长技术、应用领域和前沿研究进展,并对未来金刚石材料的发展趋势进行展望.
Abstract
Besides its gem properties,diamond is also a multi-functional ultra-extreme material that integrates many excellent properties,such as sound,light,heat,force,electricity,and quantum.It has been endowed with many reputations such as"diamond forever","industrial tooth","ultimate semiconductor",etc.,and has high com-mercial value,industrial value,and scientific research value.The development of Chemical Vapor Deposition(CVD)technology has greatly expanded the application fields of diamond materials and provided a foundation for activating the ultimate potential of diamond.In recent years,large-size,high-quality,low-cost and multi-style CVD diamond materials have been continuously developed,and the end use scenarios have gradually expanded from the early tool level to high-end fields such as decoration,thermodynamics,optics,and even semiconductors,showing a slight surge trend.In this paper,the research and application status of CVD diamond materials are con-ducted,the growth technology of CVD diamond,application fields the progress of and cutting-edge research are introduced,and the development trend of diamond materials in the future is prospected.
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