MEMS gyroscopes are inertial sensors developed based on Micro-Electro-Mechanical System(MEMS)technology.Thanks to its small size and low cost,MEMS gyroscopes are widely used in fields such as aerospace,in-dustrial control,consumer electronics.In order to study the relationship between the performance of MEMS gyro-scopes and their control methods,this paper introduces the working principle and main performance parameters of MEMS gyroscopes firstly.Then,it analyzes the four phases of MEMS Gyroscopes'development:open loop gyro-scope,force balance gyroscope,full angle gyroscope and frequency modulation gyroscope.At last,it summarizes the future technological development trends of MEMS gyroscopes.
维普
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