首页|Ultrathin Sn-doped Ga2O3 for power field-effect transistors:Si-compatible 4-inch array with high-k gate dielectric

Ultrathin Sn-doped Ga2O3 for power field-effect transistors:Si-compatible 4-inch array with high-k gate dielectric

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Zi-Chun Liu、Jia-Cheng Li、Hui-Xia Yang、Han Yang、Yuan Huang、Yi-Yun Zhang、Pui-To Lai、Yuan-Xiao Ma、Ye-Liang Wang

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School of Integrated Circuits and Electronics and Yangtze Delta Region Academy,Beijing Institute of Technology,Beijing 100081,China

R&D Center for Solid-state Lighting,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China

Department of Electrical and Electronic Engineering,The University of Hong Kong,Hong Kong 999077,China

National Key R&D Program of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of China

2023YFB3611700921632066210104412321004

2024

科学通报(英文版)
中国科学院

科学通报(英文版)

CSTPCD
ISSN:1001-6538
年,卷(期):2024.69(12)