Non-equilibrium compression achieving high sensitivity and linearity for iontronic pressure sensors

Jing Yang ¹Zhibin Li ¹Ying Wu ²Yong Shen ¹Ming Zhang ³Bin Chen ⁴Guojiang Yuan ¹Songhua Xiao ¹Jiansong Feng ¹Xu Zhang ¹Yuwei Tang ¹Sunan Ding ⁵Xiaolong Chen ¹Taihong Wang⁶

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作者信息

1. Department of Electrical and Electronic Engineering,Southern University of Science and Technology,Shenzhen 518055,China
2. School of Microelectronics,Southern University of Science and Technology,Shenzhen 518055,China
3. Key Laboratory for Micro/Nano Optoelectronic Devices of Ministry of Education,Engineering Research Center of Advanced Semiconductor Technology and Application of Ministry of Education,Changsha Semiconductor Technology and Application Innovation Research Institute,College of Semiconductors(College of Integrated Circuits),Hunan University,Changsha 410082,China
4. School of Environmental and Chemical Engineering,Yanshan University,Qinhuangdao 066004,China
5. School of Integrated Circuits,Nanjing University,Suzhou 215163,China
6. Department of Electrical and Electronic Engineering,Southern University of Science and Technology,Shenzhen 518055,China;School of Microelectronics,Southern University of Science and Technology,Shenzhen 518055,China
折叠

Abstract

Flexible pressure sensors with high sensitivity and linearity are highly desirable for robot sensing and human physiological signal detection.However,the current strategies for stabilizing axial microstruc-tures(e.g.,micro-pyramids)are mainly susceptible to structural stiffening during compression,thereby limiting the realization of high sensitivity and linearity.Here,we report a bending-induced non-equilibrium compression process that effectively enhances the compressibility of microstructures,thereby crucially improving the efficiency of interfacial area growth of electric double layer(EDL).Based on this principle,we fabricate an iontronic flexible pressure sensor with vertical graphene(VG)array electrodes.Ultra-high sensitivity(185.09 kPa-1)and linearity(R2=0.9999)are realized over a wide pressure range(0.49 Pa-66.67 kPa).It also exhibits remarkable mechanical stability during compression and bending.The sensor is successfully employed in a robotic gripping task to recognize the targets of different materials and shapes based on a multilayer perception(MLP)neural network.It opens the door to realizing haptic sensing capabilities for robotic hands and prosthetic limbs.

Key words

Artificial mechanoreceptor/Pressure sensor/Vertical grapheme/Ionic nanofiber/Object recognition/E-skin

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基金项目

Guangdong Major Talent Project(2019CX01X014)

Guangdong Major Talent Project(2019QN01C177)

出版年

2024

科学通报(英文版)

中国科学院

科学通报(英文版)

CSTPCD

ISSN：1001-6538

参考文献量33

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