With the upgrading of semiconductor production technology,the center of the wafer needs to be more accurately located in the process of wafer processing.The radius of rotation method,center of mass method and circle least square method used in traditional wafer prealignment system cannot effectively avoid the problem of abnormal sampling points introduced by measurement errors.Therefore,based on the circle least square method,an improved wafer prealignment algorithm with increased weight is proposed in this paper,that is,the weighting function is added while the interference points are removed.When the coordinates of the wafer center is determined,the influence of abnormal sampling points on the fitting results should be reduced as much as possible.
关键词
半导体生产/晶圆预对准/圆最小二乘法/权重函数
Key words
semiconductor production/wafer prealignment/circle least square method/weighting function
维普
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