Research Progress of Preparation Technology of Enriched B11-Boron Trifluoride
Enriched B11 boron trifluoride is an important doping source for semiconductor ion implantation.Compared with natural abundance boron trifluoride,it can significantly improve the stability and radiation interference of chips,and is widely used infi fields such as communication,national defense,aerospace,etc.With the process of domestic substitution,its preparation process and production route show corresponding advantages and disadvantages.In actual production,enterprises can choose reasonable production routes based on their own situation to obtain enriched B11 boron trifluoride products.This paper mainly discusses the research progress of preparation technology of enriched B11 boron trifluoride,for reference.
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