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腔室清洗的单臂组合设备初始暂态调度

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为了提升腔室洁净度，晶圆厂需对组合设备腔室进行清洗操作，从而提高晶圆的加工质量。考虑腔室清洗时间和晶圆驻留时间的约束条件下，本文研究了单臂组合设备的初始暂态调度问题。首先，提出了机械手的初始暂态活动规则，并对机械手活动序列进行描述，实现了系统的初始暂态可调度性;其次，对机械手在初始暂态和稳态的活动时间进行了建模;然后，根据系统的时间特性，建立了初始暂态调度的线性规划模型;最后，通过实例验证了该方法的有效性。与已有的虚拟晶圆方法相比，该调度方法能有效减少初始暂态的完工时间，提高了组合设备的晶圆生产效率。
Scheduling of start-up process for single-arm cluster tools with chamber cleaning operations
In order to improve the cleanliness of chambers,fabs generally perform chamber cleaning operations on cluster tools,thereby improving wafer quality.The start-up process scheduling problem is addressed considering the time constraints of wafer residency and chamber cleaning.Firstly,start-up process activity rule of robot is proposed and the sequence of robot activities is described to achieve the start-up process schedulability.Secondly,the activity time of robot in the start-up process and steady state is modeled.Then,a linear programming model for start-up process scheduling is developed based on the time characteristics.Finally,examples are given to verify the validity of the proposed approach.Compared with the virtual wafer method proposed by the predecessors,the scheduling scheme can effectively reduce makespan and improve the wafer productivity of single-arm cluster tools.

cluster toolchamber cleaning operationstart-up processwafer fabrication

郭文有、潘春荣

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江西理工大学机电工程学院,江西赣州 341000

组合设备 腔室清洗 初始暂态 晶圆制造

国家自然科学基金江西省高等学校井冈学者特聘教授岗位项目Funded by Distinguished Professor Program of Jinggang Scholars in Institutions of Higher Learning,Jiangxi Province

72161019

2024

10.7641/CTA.2023.11198

控制理论与应用
华南理工大学 中国科学院数学与系统科学研究院

控制理论与应用

CSTPCD北大核心
影响因子：1.076
ISSN：1000-8152
年,卷(期)：2024.41(2)
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