Based on the phased array calibration technology of aperture field inversion,research is conducted on the impact of probe-to-antenna distance errors on calibration accuracy.The theoreti-cal analysis involves the Taylor expansion of the introduced errors,assessing their effects on ampli-tude and phase calibration.By neglecting higher-order terms,the distance errors are controlled within a tenth of a wavelength range,thereby guaranteeing calibration accuracy.The correctness of these theoretical findings is verified through the simulation design,validating their applicability as a theoretical basis for phased array antenna diagnosis and calibration.