Study on the preparation of electronic grade fluorine nitrogen mixture
Electronic grade fluorine nitrogen mixture is an important raw material in the field of fine chemical industry,which is widely used in fluorine electronic special gas,semiconductor,medicine and other fields.However,at present,the domestic electronic grade fluorine nitrogen mixture manufacturers are less,the main reason is limited by the purification technology of fluorine gas.The production process of electronic grade fluorine nitrogen mixture from the perspective of technology is discussed,that is,the electronic grade fluorine mixture is equipped with an electrolytic cell with or without hydrofluoric acid to produce crude fluorine gas.After a series of process treatment,impurities such as high content hydrogen fluoride are removed,and fine dust is removed by precision dust removal,so that it is purified into electronic grade fluorine gas.Electronic grade fluorine gas with fluorine content of more than 99.9%is obtained.Electron grade fluorine is further mixed with high purity nitrogen by partial pressure method to obtain electron grade fluorine nitrogen mixture.
electronic grade fluorine nitrogen mixturefluorine productionpurification process of fluorine gassemiconductor
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