正硅酸甲酯制备的研究进展
Research progress on production of TMOS
胡国涛 1黄家兴 2柳陈军 2陈广鹏2
作者信息
- 1. 瓮福(集团)有限责任公司,贵州 贵阳 550000
- 2. 厦门大学,福建 厦门 361102
- 折叠
摘要
国家对集成电路行业的投入引来电子级化学品的快速发展.正硅酸甲酯(TMOS)广泛应用于化工、光学玻璃、电子电气等诸多领域.介绍工业级与电子级TMOS的质量,概述工业级和电子级TMOS制备工艺研究进展,以期为电子级TMOS的制备工艺提供技术思路.
Abstract
The national investment in the integrated circuit industry has led to rapid development in electronic grade chemicals.TMOS is widely used in various fields such as chemical,optical glass,electronic and electrical field.The quality of industrial grade and electronic grade TMOS are introduced,the research progress on industrial grade and electronic grade TMOS production are focused on,aiming to provide technical ideas for the preparation process of electronic grade TMOS.
关键词
正硅酸甲酯/工业级/电子级/提纯Key words
tetramethyl orthosilicate(TMOS)/industrial grade/electronic grade/purification引用本文复制引用
出版年
2024
NETL
NSTL
万方数据