首页|正硅酸甲酯制备的研究进展

正硅酸甲酯制备的研究进展

扫码查看
国家对集成电路行业的投入引来电子级化学品的快速发展.正硅酸甲酯(TMOS)广泛应用于化工、光学玻璃、电子电气等诸多领域.介绍工业级与电子级TMOS的质量,概述工业级和电子级TMOS制备工艺研究进展,以期为电子级TMOS的制备工艺提供技术思路.
Research progress on production of TMOS
The national investment in the integrated circuit industry has led to rapid development in electronic grade chemicals.TMOS is widely used in various fields such as chemical,optical glass,electronic and electrical field.The quality of industrial grade and electronic grade TMOS are introduced,the research progress on industrial grade and electronic grade TMOS production are focused on,aiming to provide technical ideas for the preparation process of electronic grade TMOS.

tetramethyl orthosilicate(TMOS)industrial gradeelectronic gradepurification

胡国涛、黄家兴、柳陈军、陈广鹏

展开 >

瓮福(集团)有限责任公司,贵州 贵阳 550000

厦门大学,福建 厦门 361102

正硅酸甲酯 工业级 电子级 提纯

2024

磷肥与复肥
郑州大学 中国磷肥工业协会

磷肥与复肥

CSTPCD
影响因子:0.291
ISSN:1007-6220
年,卷(期):2024.39(12)
  • 1