A preparation method of micro-column transmission electron microscope sample
Taking Cr2AlC coating as an example,a preparation method of transmission electron microscope specimen based on micropillar was introduced in detail.First,the high-intensity ion beam was used to remove the material around the micropillars together with the area below the protective layer to form a micron sheet with a length of 10 μm,a depth of 6 μm,and a thickness of 1 μm.Finally,the ion beam was used to thin the micron sheet to a thickness that could be observed by the transmission electron microscope.The sample preparation process needed to deposit a protective layer on both sides and the top of the micron column to be thinned to avoid processing damage to the micron column during the thinning process,thereby obtaining a high-quality transmission electron microscope sample.
focused ion beammicro-column compressiontransmission electron microscopythinningsample preparationCr2AlC coating
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