流体机械2024,Vol.52Issue(12) :79-86.DOI:10.3969/j.issn.1005-0329.2024.12.011

大口径光学镜面的扇形射流自动清洗技术

Automatic cleaning technology for large-aperture optical mirror surfaces using fan-shaped jet streams

何其佳 彭起 侯智芸 江川 王培成
流体机械2024,Vol.52Issue(12) :79-86.DOI:10.3969/j.issn.1005-0329.2024.12.011

大口径光学镜面的扇形射流自动清洗技术

Automatic cleaning technology for large-aperture optical mirror surfaces using fan-shaped jet streams

何其佳 1彭起 2侯智芸 1江川 1王培成1
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作者信息

  • 1. 中国科学院 光场调控科学技术全国重点实验室,成都 610209;中国科学院 光束控制重点实验室,成都 610209;中国科学院 光电技术研究所,成都 610209
  • 2. 中国科学院 光场调控科学技术全国重点实验室,成都 610209;中国科学院 光束控制重点实验室,成都 610209;中国科学院 光电技术研究所,成都 610209;中国科学院大学,北京 100049
  • 折叠

摘要

针对目前大口径镜面无与之匹配的自动清洗设备的问题,提出了一种扇形射流自动清洗技术,对扇型喷嘴的结构、布置形式和清洗力进行了研究,喷射角度在25°~125°范围内可控,提出气液混合清洗方式,结合自动化设备,在保护镜面不受损伤的前提下,设计了一套针对大口径光学镜面的自动清洗装置,可以在1 min内完成镜面清洗.通过Zeta仪对清洗后的镜面形貌进行观测,剩余杂质颗粒直径<10 μm,无凹坑、划痕等缺陷.清洗装置自动化程度高,清洁速度快,清洁效果满足加工及镀膜要求,不会损伤镜面.研究为大口径光学镜面的自动化清洗提供了一种思路.

Abstract

For the current issue of the lack of suitable automatic cleaning equipment for large-aperture mirror surfaces,a fan-shaped jet automatic cleaning technology was proposed.The structure,arrangement,and cleaning force of fan-shaped nozzles were studied.The spray angle was controllable within the range of 25° to 125°.An innovative gas-liquid mixed cleaning approach was proposed,and in combination with automated equipment,an automated cleaning device specifically for large-aperture optical mirrors was designed without damaging the mirror surface during the process.This device is capable of completing the mirror cleaning within 1 min.Post-cleaning surface morphology analysis using a Zeta instrument reveals that the remaining impurity particles are smaller than 10 μm in diameter,without observable defects such as pits or scratches.The automated cleaning device boasts high automation,fast cleaning speed,and a cleaning effect,which meet both manufacturing and coating requirements without damaging the mirror surface.The research provides an approach for automated cleaning of large-aperture optical mirror surfaces.

关键词

大口径光学镜面清洗/自动清洗/扇形射流/喷嘴布置

Key words

cleaning of large-aperture optical mirrors/automatic cleaning/fan-shaped jet/nozzle arrangement

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出版年

2024
流体机械
中国机械工程学会

流体机械

CSTPCDCSCD北大核心
影响因子:1.418
ISSN:1005-0329
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