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紧凑型激光诱导击穿光谱仪的研制

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基于煤质分析、冶金、水质检测等众多领域对激光诱导击穿光谱技术(LIBS)的需求，本研究设计了一台基于激光诱导击穿光谱原理的紧凑型快速检测装置，其具有良好的稳定性和较高的激光能量(0～100 mJ)，可进行全自动化谱线对比与筛选，从而实现多样品、多元素的LIBS快速检测。在参数优化的基础上，利用该装置对7个钢样所含的硅元素与碳元素进行了检测分析。实验结果表明，当延迟时间为1 μs、离焦量为0 mm、激光能量为60 mJ时，可以获得最佳的硅、碳特征光谱数据。在最优实验条件下，对7个样品进行定量分析，利用内标法建立硅、碳元素的定标拟合曲线，其相关系数分别为0。986和0。999，相对强度比的相对标准误差不超过5%，预测值与实际值偏差较小。研究结果验证了该仪器具有良好的分析性能，对多元素检测、可移动式LIBS仪器的发展具有参考意义。
Design of compact laser-induced breakdown spectroscopy instrument
Based on the demand for laser-induced breakdown spectroscopy(LIBS)technology in various fields such as coal analysis,metallurgy and water quality testing,a compact rapid detection device is developed based on the principle of laser-induced breakdown spectroscopy.The developed LIBS spectrometer has good stability and high laser energy(0-100 mJ),and can perform fully automated spectral line comparison and selection for quantitative analysis,thus facilitating rapid LIBS detection of multiple samples and elements.On the basis of parameter optimization,the device was used to detect and analyze the silicon and carbon elements contained in 7 steel samples.Experimental results show that the optimal silicon and carbon characteristic spectral data can be obtained with a delay time of 1 μs,defocus amount of 0 mm,and laser energy of 60 mJ.Under the optimal experimental conditions,quantitative analysis of the seven samples was conducted,and calibration fitting curves for silicon and carbon elements were established using the internal standard method,yielding correlation coefficients of 0.986 and 0.999,respectively.The relative standard error of the relative intensity ratio does not exceed 5%,and the predicted values are close to the actual values.The results in this work validate the excellent analytical performance of the instrument,which is of great significance for the development of multi-element detection and portable LIBS instruments.

spectroscopylaser-induced breakdown spectroscopycompact LIBS spectrometerquantitative analysisparameter optimization

王金梅、刘旭峰、郑培超、陈光辉、刘少剑、李刚、杨志、孙志诚

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重庆邮电大学光电工程学院,光电信息感测与传输技术重庆市重点实验室,重庆 400065

光谱学 激光诱导击穿光谱 紧凑型LIBS光谱仪 定量分析 参数优化

国家自然科学基金重庆邮电大学成果研制展示项目重庆市教委科学技术研究计划重庆市留学人员回国创业创新支持计划

32171627A2023-041KJZD-M202200602RC2022-56

2024

10.3969/j.issn.1007-5461.2024.03.003

量子电子学报
中国光学学会基础光学专业委员会 中国科学院合肥物质科学研究院

量子电子学报

CSTPCD北大核心
影响因子：0.67
ISSN：1007-5461
年,卷(期)：2024.41(3)
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