To address the issues of low sensitivity and long response recovery time in ZnO gas sensors,the magnetron sputtering method was used to construct a ZnO film with nanostructure by regulating the growth conditions.The morphology,crystallographic orientation and its gas sensing performance of ZnO nanostructure film under different growth conditions were studied.The results show that under high growth rate and high temperature conditions,it is easy to grow into a columnar crystal film with a(103)crystal plane preferred orientation structure;its sensitivity to ethanol can reach 81.7.
NETL
NSTL
万方数据
