摘要
微电铸工艺提供了一种有效的技术手段来制造金属模具,这种金属模具可被用于微图形的复制.模具的微电铸加工存在一个瓶颈问题:模具表面的不平整.金属模具的弯曲是造成模具表面不平整的主要原因之一.金属模具的弯曲变形会对微结构的复制精度产生影响.为了获得低变形镍模具,对微电铸工艺参数进行了优化.优化后的微电铸液中含有的镍离子质量浓度为80 ～ 90 g/L,硼酸的质量浓度为40 ～45 g/L,并且加入了0.3％ L-1的润湿剂,其pH值控制在3.7～4.2之间.微电铸液的温度保持在50～ 55℃.在微电铸过程中,采用了电流密度为2～3A/dm2的脉冲电流,占空比为0.2.结果表明:采用优化后的工艺参数,可以获得低变形的镍模具,其变形量下降了19％.利用优化后的微电铸工艺,加工了一种可以用于热压工艺的镍模具,模具上的图形线宽为5 μm,深度为5μm.
Abstract
Micro electroforming is an effective technique for fabricating metal mold which can be used for the replication of micro-features.A bottle-neck problem in the mold electroforming is the unevenness for the mold surface.And the bend deformation of the metal mold is one of the main causes of the unevenness of the mold surface which will bring adverse effects on the size precision of replicated microstructures.In this paper,micro electroforming process parameters were optimized to obtain low deformation mold.The electroforming solution contained 80-90 g/L nickel (Ni) ion,40-45 g/L boric acid and 0.3％ L-1 wetting agents,and its pH value was 3.7-4.2.The electroforming temperature was controlled at 50-55 ℃.The pulse current was used during electroforming with a density of 2-3 A/dm2 and a duty cycle of 0.2.Results show that by using the optimized parameters,the deformation of the metal mold was reduced by 19％.A Ni mold,which contains the micro-features of 5 μm in width and 5 μm in height,was fabricated for hot embossing.
基金项目
国家自然科学基金(91023017)
国家自然科学基金(20890024)
国家自然科学基金(91023046)
国家自然科学基金(51105060)
国家重点基础研究发展规划(973计划)(2007CB714502)
中国博士后科学基金(20100481237)
中国博士后科学基金(201104601)
国家科技期刊平台
NSTL
维普
万方数据