首页|Air-coupled piezoelectric micromachined ultrasonic transducers for surface stain detection and imaging

Air-coupled piezoelectric micromachined ultrasonic transducers for surface stain detection and imaging

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This paper proposes an air-coupled piezoelectric micromachined ultrasonic transducer(PMUT)for detection and imaging of surface stains.A 508 kHz PMUT array is designed,fabricated,and characterized in terms of its electrical and acoustic properties,and it is used in a pulse echo validation test.Imaging of stains on metal blocks is successfully demonstrated.Compared with existing optical methods for stain detection,the proposed approach can work in a dark environment without color requirements.This work provides a new and promising route for the development of miniaturized stain detection systems.

PMUTAir-coupled imagingStain detectionTime of flight

Sheng Sun、Jianyuan Wang、Yuan Ning、Menglun Zhang

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State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China

国家自然科学基金Tianjin Municipal Science and Technology ProjectNational Key Research and Development ProgramNanchang Institute for Microtechnology of Tianjin University

6200132220JCQNJC0112002020YFB2008801

2022

纳米技术与精密工程(英文)
中国微米纳米技术学会,天津大学

纳米技术与精密工程(英文)

CSTPCDCSCDEI
影响因子：0.476
ISSN：1672-6030
年,卷(期)：2022.5(1)
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