首页|A prototype portable instrument employing micro-preconcentrator and FBAR sensor for the detection of chemical warfare agents

A prototype portable instrument employing micro-preconcentrator and FBAR sensor for the detection of chemical warfare agents

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The presence of chemical warfare agents(CWAs)in the environment is a serious threat to human safety,but there are many prob-lems with the currently available detection methods for CWAs.For example,gas chromatography-mass spectrometry cannot be used for in-field detection owing to the rather large size of the equipment required,while commercial sensors have the disadvantages of low sensitivity and poor selectivity.Here,we develop a portable gas sensing instrument for CWA detection that consists of a MEMS-fabricated micro-preconcentrator(μPC)and a film bulk acoustic resonator(FBAR)gas sensor.The μPC is coated with a nanoporous metal-organic framework material to enrich the target,while the FBAR provides rapid detection without the need for extra car-rier gas.Dimethyl methylphosphonate(DMMP),a simulant of the chemical warfare agent sarin,is used to test the performance of the instrument.Experimental results show that the μPC provides effective sample pretreatment,while the FBAR gas sensor has good sensitivity to DMMP vapor.The combination of μPC and FBAR in one instrument gives full play to their respective advantages,reduc-ing the limit of detection of the analyte.Moreover,both the μPC and the FBAR are fabricated using a CMOS-compatible approach,and the prototype instrument is compact in size with high portability and thus has potential for application to in-field detection of CWAs.

Micro-preconcentratorFilm bulk acoustic resonatorChemical warfare agentMicroelectromechanical system

Xu Yan、Hemi Qu、Ye Chang、Wei Pang、Xuexin Duan

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State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China

College of Precision Instrument and Optoelectronics Engineering,Tianjin University,Tianjin 300072,China

Key Laboratory of Advanced Energy Materials Chemistry(Ministry of Education),Nankai University,Tianjin 300071,China

国家自然科学基金国家自然科学基金National Key Research and Development Program of ChinaTianjin Applied Basic Research and Advanced Technology高等学校学科创新引智计划(111计划)Foundation for Talent Scientists of Nanchang Institute for Micro-technology of Tianjin University

62174119218611320012018YFE011870017JCJQJC43600B07014

2022

纳米技术与精密工程(英文)
中国微米纳米技术学会,天津大学

纳米技术与精密工程(英文)

CSTPCDCSCDEI
影响因子：0.476
ISSN：1672-6030
年,卷(期)：2022.5(1)
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