首页|Design of interdigitated transducers for acoustofluidic applications

Design of interdigitated transducers for acoustofluidic applications

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Interdigitated transducers(IDTs)were originally designed as delay lines for radars.Half a century later,they have found new life as actua-tors for microfluidic systems.By generating strong acoustic fields,they trigger nonlinear effects that enable pumping and mixing of fluids,and moving particles without contact.However,the transition from signal processing to actuators comes with a range of challenges con-cerning power density and spatial resolution that have spurred exciting developments in solid-state acoustics and especially in IDT design.Assuming some familiarity with acoustofluidics,this paper aims to provide a tutorial for IDT design and characterization for the purpose of acoustofluidic actuation.It is targeted at a diverse audience of researchers in various fields,including fluid mechanics,acoustics,and microelectronics.

Acoustic fieldSurface acoustic waveTransducerFinite-element analysisSimulationAcousticalpropertiesLab-on-a-chipAcoustic wave attenuation

Shuren Song、Qi Wang、Jia Zhou、Antoine Riaud

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State Key Laboratory of ASIC and System,School of Microelectronics,Fudan University,Shanghai,People's Republic of China

国家自然科学基金国家自然科学基金复旦大学项目复旦大学项目复旦大学项目

22QA140090022WZ25022002021MS0012021MS0022020KF006

2022

纳米技术与精密工程(英文)
中国微米纳米技术学会,天津大学

纳米技术与精密工程(英文)

CSTPCDCSCDEI
影响因子:0.476
ISSN:1672-6030
年,卷(期):2022.5(3)
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