首页|Direct fabrication of flexible tensile sensors enabled by polariton energy transfer based on graphene nanosheet films

Direct fabrication of flexible tensile sensors enabled by polariton energy transfer based on graphene nanosheet films

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A fundamental problem in the direct manufacturing of flexible devices is the low melting temperature of flexible substrates,which hin-ders the development of flexible electronics.Proposed here is an electron-cyclotron-resonance sputtering system that can batch-fabricate devices directly on flexible substrates under a low temperature by virtue of the polariton energy transfer between the plasma and the material.Flexible graphene nanosheet-embedded carbon(F-GNEC)films are manufactured directly on polyimide,polyethylene terephthalate,and polydimethylsiloxane,and how the substrate bias(electron energy),micro wave power(plasma flux and energy),and magnetic field(electron flux)affect the nanostructure of the F-GNEC films is investigated,indicating that electron energy and flux contribute to the formation of standing graphene nanosheets in the film.The films have good uniformity of distribution in a large size(17 mm x 17 mm),and tensile and angle sensors with a high gauge factor(0.92)and fast response(50 ms)for a machine hand are obtained by virtue of the unique nanostructure of the F-GNEC film.This work sheds light on the quantum manufacturing of carbon sensors and its applications for intelligent machine hands and virtual-reality technology.

Direct flexible fabricationGraphene nanosheets filmPolariton energy transferFlexible sensorQuantum manufacturing

Xi Zhang、Junchi Ma、Wenhao Huang、Jichen Zhang、Chaoyang Lyu、Yu Zhang、Bo Wen、Xin Wang、Jing Ye、Dongfeng Diao

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College of Mechatronics and Control Engineering,Shenzhen University,Shenzhen 518060,China

Research Center of Medical Plasma Technology,Shenzhen University,Shenzhen 518060,China

Shenzhen Milebot Robotics Co.,Ltd.,Shenzhen 518060,China

National Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNatural Science Foundation of Guangdong ProvinceGuangdong Kangyi Special Fund

52275565NSFC-JSPS:52011540005621041552022A15150116672020KZDZX1173

2023

10.1063/10.0016758

纳米技术与精密工程(英文)
中国微米纳米技术学会,天津大学

纳米技术与精密工程(英文)

CSTPCDCSCD北大核心EI
影响因子：0.476
ISSN：1672-6030
年,卷(期)：2023.6(1)
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