首页|Design and fabrication of a series contact RF MEMS switch with a novel top electrode

Design and fabrication of a series contact RF MEMS switch with a novel top electrode

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Radio-frequency(RF)micro-electro-mechanical-system(MEMS)switches are widely used in communication devices and test instruments.In this paper,we demonstrate the structural design and optimization of a novel RF MEMS switch with a straight top electrode.The insertion loss,isolation,actuator voltage,and stress distribution of the switch are optimized and explored simultaneously by HFSS and COMSOL software,taking into account both its RF and mechanical properties.Based on the optimized results,a switch was fabricated by a micromachining process compatible with conventional IC processes.The RF performance in the DC to 18 GHz range was measured with a vector network analyzer,showing isolation of more than 21.28 dB over the entire operating frequency range.Moreover,the required actuation voltage was about 9.9 V,and the switching time was approximately 33 μs.A maximum lifetime of 109 switching cycles was obtained.Additionally,the dimension of the sample is 1.8 mm×1.8 mm×0.3 mm,which might find application in the current stage.

RFMEMS switchcommunication devicesstraight top electrode

Qiannan Wu、Honglei Guo、Qiuhui Liu、Guangzhou Zhu、Junqiang Wang、Yonghong Cao、Mengwei Li

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School of Semiconductors and Physics,North University of China,Taiyuan 030051,China

School of Instrumentation and Intelligent Future Technology,North University of China,Taiyuan 030051,China

Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China

Center for Microsystem Integration,North University of China,Taiyuan 030051,China

School of Instrumentation and Electronics,North University of China,Taiyuan 030051,China

School of Aeronautics and Astronautics,North University of China,Taiyuan 030051,China

Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China

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Equipment Development Department of the New Product ProjectShanxi Province Postgraduate Education Reform ProjectDouble First-Class DisciplinesNational Firstclass Curriculum ConstructionProvince Future Technology ProjectProvince Future Technology ProjectProvince Future Technology ProjectProvince Future Technology ProjectProvince Future Technology Project

2019XW001011012103110121331101316811013169

2023

10.1063/10.0016903

纳米技术与精密工程(英文)
中国微米纳米技术学会,天津大学

纳米技术与精密工程(英文)

CSTPCDCSCD北大核心EI
影响因子：0.476
ISSN：1672-6030
年,卷(期)：2023.6(1)
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