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Research trends in methods for controlling macro-micro motion platforms

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With ongoing economic,scientific,and technological developments,the electronic devices used in daily lives are developing toward precision and miniaturization,and so the demand for high-precision manufacturing machinery is expanding.The most important piece of equipment in modern high-precision manufacturing is the macro-micro motion platform(M3P),which offers high speed,precision,and efficiency and has macro-micro motion coupling characteristics due to its mechanical design and composition of its driving components.Therefore,the design of the control system is crucial for the overall precision of the platform;conventional proportional-integral-derivative control cannot meet the system requirements,and so M3Ps are the subject of a growing range of modern control strategies.This paper begins by describing the development history of M3Ps,followed by their platform structure and motion control system components,and then in-depth assessments of the macro,micro,and macro-micro control systems.In addition to examining the advantages and disadvantages of current macro-micro motion control,recent technological breakthroughs are noted.Finally,based on existing problems,future directions for M3P control systems are given,and the present conclusions offer guidelines for future work on M3Ps.

Macro-micro motion platformPrecision positioningControl methodPiezoelectric driverVoice coil motor

Lufan Zhang、Pengqi Zhang、Boshi Jiang、Heng Yan

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College of Mechanical and Electrical Engineering,Henan University of Technology,Zhengzhou 450001,China

China Postdoctoral Science FoundationNational Natural Science Foundation of ChinaYoung Backbone Teacher Training Program in Henan University of TechnologyEducation Department of Henan Province Natural Science ProjectNatural Science Project of Henan Provincial Department of Science and Technology

5170513221A460006222102220088

2023

10.1063/10.0019384

纳米技术与精密工程(英文)
中国微米纳米技术学会,天津大学

纳米技术与精密工程(英文)

CSTPCDCSCDEI
影响因子：0.476
ISSN：1672-6030
年,卷(期)：2023.6(3)
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