Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring

Jiahui Xu ¹Minghao Wang ²Minyi Jin ¹Siyan Shang ¹Chuner Ni ¹Yili Hu ³Xun Sun ⁴Jun Xu ⁴Bowen Ji ⁵Le Li ⁶Yuhua Cheng ²Gaofeng Wang¹

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作者信息

1. School of Electronics & Information,MOE Engineering Research Center of Smart Microsensors and Microsystems,Hangzhou Dianzi University,Hangzhou 310018,China
2. School of Electronics & Information,MOE Engineering Research Center of Smart Microsensors and Microsystems,Hangzhou Dianzi University,Hangzhou 310018,China;Wenzhou Institute of Hangzhou Dianzi University,Wenzhou 310018,China
3. Key Laboratory of Intelligent Operation and Maintenance Technology & Equipment for Urban Rail Transit of Zhejiang Province,College of Engineering,Institute of Precision Machinery and Smart Structure,Zhejiang Normal University,Jinhua 321004,China
4. Institute of Guizhou Aerospace Measuring and Testing Technology,Guiyang 550009,China
5. Unmanned System Research Institute,Northwestern Polytechnical University,Xi'an 710072,China
6. Research & Development Institute of Northwestern Polytechnical University in Shenzhen,Shenzhen 518057,China
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Abstract

Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibil-ity and wearability.However,their relatively low sensitivity,linearity,and stability have hindered their large-scale commercial application.Herein,a flexible capacitive pressure sensor based on an interdigital electrode structure with two porous microneedle arrays(MNAs)is pro-posed.The porous substrate that constitutes the MNA is a mixed product of polydimethylsiloxane and NaHCO3.Due to its porous and interdigital structure,the maximum sensitivity(0.07 kPa-1)of a porous MNA-based pressure sensor was found to be seven times higher than that of an imporous MNA pressure sensor,and it was much greater than that of a flat pressure sensor without a porous MNA structure.Finite-element analysis showed that the interdigital MNA structure can greatly increase the strain and improve the sensitivity of the sen-sor.In addition,the porous MNA-based pressure sensor was found to have good stability over 1500 loading cycles as a result of its bilayer parylene-enhanced conductive electrode structure.Most importantly,it was found that the sensor could accurately monitor the motion of a finger,wrist joint,arm,face,abdomen,eye,and Adam's apple.Furthermore,preliminary semantic recognition was achieved by monitoring the movement of the Adam's apple.Finally,multiple pressure sensors were integrated into a 3 × 3 array to detect a spatial pressure distribu-tion.Compared to the sensors reported in previous works,the interdigital electrode structure presented in this work improves sensitivity and stability by modifying the electrode layer rather than the dielectric layer.

Key words

Capacitive pressure sensor/Microneedle array/Porous PDMS/Interdigital electrode

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基金项目

国家自然科学基金(62104056)

浙江省自然科学基金(LQ21F010010)

国家自然科学基金(62141409)

国家自然科学基金(62204204)

国家重点研发计划(2022ZD0208602)

Zhejiang Provincial Key Research and Development Fund(2019C04003)

Zhejiang Provincial Key Research and Development Fund(2021C01041)

Shanghai Sailing Program(21YF1451000)

Key Research and Development Program of Shaanxi(2022GY-001)

出版年

2024

纳米技术与精密工程(英文)

中国微米纳米技术学会,天津大学

纳米技术与精密工程(英文)

CSTPCDCSCDEI

影响因子：0.476

ISSN：1672-6030

参考文献量34

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