Abstract
The development of nanoelectronics and nanotechnologies has been boosted significantly by the emergence of 2D materials because of their atomic thickness and peculiar properties,and developing a universal,precise patterning technology for single-layer 2D materials is critical for assembling nanodevices.Demonstrated here is a nanomachining technique using electrical breakdown by an AFM tip to fabricate nanopores,nanostrips,and other nanostructures on demand.This can be achieved by voltage scanning or applying a constant voltage while moving the tip.By measuring the electrical current,the formation process on single-layer materials was shown quantitatively.The present results provide evidence of successful pattern fabrication on single-layer MoS2,boron nitride,and graphene,although further confirmation is still needed.The proposed method holds promise as a general nanomachining technology for the future.
基金项目
国家自然科学基金(12075191)
国家自然科学基金(12388101)
国家自然科学基金(12241201)
中央高校基本科研业务费专项(D5000230120)
Natural Science Basic Research Program of Shaanxi Province(2023-JC-YB-541)
国家科技期刊平台
NSTL
维普
万方数据