首页|不同温度硅纳米薄膜在表面重构下杨氏模量的分子动力学研究

不同温度硅纳米薄膜在表面重构下杨氏模量的分子动力学研究

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采用分子动力学方法计算了100K到800K之间(001)面硅纳米薄膜(1nm,2nm厚)[110]与[1-10]两个方向上的杨氏模量.2×1表面重构形成了dimmer键,使[110]方向杨氏模量大于[1-10]方向杨氏模量.纳米薄膜的杨氏模量随着温度升高而下降.热膨胀导致了温度效应.当尺度到达纳米尺度,表面重构和温度效应更加明显.
Molecular Dynamics Study on Young's Modulus of Silicon Nanofilms Under Surface Reconstruction at Finite Temperature
In this paper, we investigate Si (001) nanofilms (1nm and 2nm thickness) Young's modulus under (2×1) surface reconstruction along [110] and [1-10] directions at different temperature from 100K to 800K by Molecular dynamics (MD) is investigated. The (2×1) surface reconstruction leads to formation of dimmers, making Young's moduli along the [110] direction stiffer than the [1-10] direc-tion. Young's moduli decrease as temperature increases. Thermal expansion cause temperature effect .Surface reconstruction and temperature effect are more significant as size is scaled down to nanoscale.

molecular dynamicsyoung's modulisurface reconstructiontemperature effect

王雅斌、于虹、谭一云

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东南大学MEMS教育部重点实验室,江苏,南京,210096

分子动力学 杨氏模量 表面重构 温度效应

国家重点基础研究发展规划(973计划)

2006CB300404

2009

纳米科技
西安纳米科技学会 陕西省电子学会纳米技术专业委员会

纳米科技

ISSN:1812-1918
年,卷(期):2009.6(2)
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