Advance of Nanolithography,its Applications and Prospects
This paper will review the development of nanolithography,nanofabrication technology and their applications in nanoelectronics,nano-bioscience,nanophotonics and photonic metamaterials.The scope of the techniques in this review is within top-down regime covering a large area (EBL,NIL,hot embossing,RIE,novel lift-off process and nanofabrications).Then,the latest development in nanolithography such as near field lithography and combined nanoimprint and photolithography (CNP) will be presented.The prospective extension of nanolithography developed at laboratory level to industrial application will be discussed.The final conclusion of this paper is to convince people that the socalled nanotechnology is to make things smaller for larger functionality.
nanolithographynear field lithographycombined nanoimprintphotolithography
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英国卢瑟福Appleton国家实验室微纳技术中心
nanolithography near field lithography combined nanoimprint photolithography
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