Overview of high precision surface measurement for optical element with complex curved surface
The application of complex curved optical components in these systems enhances design flexibility,reduces the number of components required,and facilitates the miniaturization and lightweighting of optical systems.Celebrated as transformative elements in modern optical systems,these components find extensive applications in space optics,lithography systems,automotive lighting,and more,significantly advancing the development of aerospace,national defense,and high-tech civilian enterprises.However,the high surface shape precision required by complex curved optical components poses a challenge.The ability to conduct high-precision surface shape inspections to guide processing has become a bottleneck limiting the widespread application of such components.This paper categorizes and reviews the commonly used surface shape inspection methods for complex curved optical components.According to whether interference principle is adopted,the measurement methods are divided into two categories:non-interferometry and interferometry.It also looks back at the development of these methods,focusing on the characteristics of several typical methods for surface shape inspection,and anticipates future trends in the development of high-precision surface shape inspection technologies for complex curved optical components.
万方数据
维普
