摘要
掺钽氧化锡(TTO)原粉质量是决定其靶材质量的关键性因素.对TTO原料粉体,先通过pH调控、分散剂用量和球磨分散工艺,制备出粒度集中、分散稳定的纳米浆料;再通过调控浆料固含量、进风温度和喷雾器转速得到球形度好、粒度分布均匀、流动性好的TTO造粒粉;最后通过TEM、SEM、紫外分光光度计、激光粒度分布仪和振实密度仪等技术进行表征.结果表明:pH=7,分散剂聚乙烯吡咯烷酮(PVP)用量为 10%,球磨转速和球磨时间分别为 2 400 r/min、15 min时,纳米浆料体系稳定性最好,分散效果最佳;固含量为 40%、喷雾器进风温度为220℃、喷雾器转速为 1 800 r/min时的TTO造粒粉粒径分布较窄(10～20 μm),粉末球形度高,表面光滑无团聚,流动性优异.
Abstract
The quality of tin-tantalum oxide(TTO)raw powder is a key factor in determining the quality of its target material.For the TTO raw material powder,a nano slurry with concentrated particle size distribution and stable dispersion was prepared by adjusting the pH value,dispersant dosage,and ball milling dispersion process.By controlling the slurry solid content,inlet air temperature,and atomizer speed,TTO granulation powder with excellent sphericity,uniform particle size distribution,and good fluidity was obtained.Finally,characterization was performed using techniques such as TEM,SEM,UV-Vis spectrophotometry,laser particle size distribution analysis,and vibrating density measurement.The results show that the nano slurry system achieves the best stability and dispersion when the pH is 7,the PVP dispersant dosage is 10%,the ball milling speed is 2 400 r/min and the milling time is 15 minutes.The TTO granulation powder exhibits a narrow particle size distribution(approximately 10 to 12 μm),high sphericity,a smooth surface without agglomeration,and excellent flowability when the solid content is 40%,the air inlet temperature is 220℃,and the atomizer speed is 1 800 r/min.
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