Pulsed Laser Annealed Ga Hyperdoped Poly-Si/SiOx Passivating Contacts for High-Efficiency Monocrystalline Si Solar Cells

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外文摘要：Polycrystalline Si(poly-Si)-based passivating contacts are promising candidates for high-efficiency crystalline Si solar cells.We show that nanosecond-scale pulsed laser melting(PLM)is an industrially viable technique to fabricate such contacts with precisely controlled dopant concentration profiles that exceed the solid solubility limit.We demonstrate that conventionally doped,hole-selective poly-Si/SiOx contacts that provide poor surface passivation of c-Si can be replaced with Ga-or B-doped contacts based on non-equilibrium doping.We overcome the solid solubility limit for both dopants in poly-Si by rapid cooling and recrystallization over a timescale of～25 ns.We show an active Ga dopant concentration of～3 X 1020 cm-3 in poly-Si which is six times higher than its solubility limit in c-Si,and a B dopant concentration as high as～1021 cm-3.We measure an implied open-circuit voltage of 735 mV for Ga-doped poly-Si/SiOx contacts on Czochralski Si with a low contact resistivity of 35.5±2.4 mΩ cm2.Scanning spreading resistance microscopy and Kelvin probe force microscopy show large diffusion and drift current in the p-n junction that contributes to the low contact resistivity.Our results suggest that PLM can be extended for hyperdoping of other semiconductors with low solubility atoms to enable high-efficiency devices.

外文关键词：

Ga hyperdopingGa passivating contactspoly-Si/SiOxpulsed laser meltingsilicon solar cell

作者：

Kejun Chen、Enrico Napolitani、Matteo De Tullio、Chun-Sheng Jiang、Harvey Guthrey、Francesco Sgarbossa、San Theingi、William Nemeth、Matthew Page、Paul Stradins、Sumit Agarwal、David L.Young

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作者单位：

Colorado School of Mines,1500 Illinois St,Golden Colorado 80401,USA

Dipartimento di Fisica e Astronomia and CNR-IMM,Università degli Studi di Padova,via Marzolo 8,Padova,Italy

National Renewable Energy Laboratory,15013 Denver West Parkway,Golden Colorado 80401,USA

基金：

National Renewable Energy Laboratory,operated by Alliance for Sustainable Energy,LLC,for the U.S.Department of Energy(DOE)U.S.Department of Energy Office of Energy Efficiency and Renewable Energy Solar Energy Technologies OfficeUniversity of Padova

项目编号：

DE-AC36-08GO28308UNIPD-ISR 2017'SENSITIZE'

出版年：

2023

DOI：

10.1002/eem2.12542

能源与环境材料(英文)

CSCD

ISSN：

年,卷(期)：2023.6(3)

参考文献量80