Design of titanium dioxide electrode EGFET pH sensor for cultivated substrate
In order to solve the problem of poor accuracy of direct online pH detection of cultivation substrate in agricultural production,a titanium dioxide(TiO2)electrode with hydrogen ion sensitivity characteristics and super hydrophilicity characteristics was prepared by using chemical corrosion method,and annealing process was used to improve the surface hardness of the electrode.TiO2 elec-trodes and metal-oxide semiconductor field-effect transistor(MOSFET)were combined to form a pH sensor based on extended gate field effect transistor(EGFET).The sensitivity of the sensor was tested to be 0.050 63 V/pH,and the maximum coefficient of variation of in the repeatability test was 0.005 7.The test results show that the sensor has good sensitivity,repeatability and stability.Four typical culti-vation substrates are selected for online pH application experiments.The maximum absolute value of pH test error is 0.18,and the maximum absolute value of pH test error is 0.11 after temperature com-pensation.The hydrophilicity of the electrode surface remains good after use.The application test results show that the sensor is suitable for online detection of pH in cultivation substrates.
国家科技期刊平台
NSTL
万方数据
