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8英寸铌酸锂晶体生长研究

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铌酸锂单晶薄膜(LNOI)在新一代信息技术中关键通信器件领域的作用日益显著,随着铌酸锂单晶薄膜制备技术和光子集成技术的发展,降低芯片成本、增加芯片集成度是光子集成芯片永恒不变的发展方向,因此迫切需求大尺寸铌酸锂晶体。本文讨论了大尺寸坩埚中熔体自然对流随着液面下降的变化规律,研究了8英寸(1英寸=2。54 cm)铌酸锂Z轴、X轴两个提拉方向的生长特点,获得等径尺寸大于φ210 mm×50 mm的8英寸Z轴、X轴铌酸锂晶体。1 mm厚X轴铌酸锂晶圆的透过率显示波长380-3 300 nm光谱的透过率超过了70%,晶片纹影图像显示晶体中存在折射率脉理缺陷。
Growth of 8-Inch Lithium Niobate Crystals
Lithium niobate film on insulator(LNOI)is increasingly applied in the field of key devices in the new generation of information technology.With the development of the techniques of lithium niobate single crystal thin film and photonic integrated circuits,low cost,high integration is the eternal development direction.Therefore,it is urgently needed the large-scale lithium niobate crystal.In this paper,the variation of natural convection of melt in large-sized crucible as the liquid level decrease was discussed,and the growth characteristics of Z-and X-axis lithium niobate crystal were discussed.The 8-inch Z-and X-axis lithium niobate crystals with the size of larger than φ210 mm × 50 mm were obtained.The transmission of the spectral range of 380~3 300 nm is more than 70%for l mm thick X-axis lithium niobate wafers.The chip moire pattern images show the presence of refractive index ripple defects in the crystal,indicating that the quality of the crystal still needs improvement.

lithium niobate8-inchnatural convectionCzochralski methodrefractive index ripple

孙德辉、韩文斌、李陈哲、彭立果、刘宏

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济南大学前沿交叉科学研究院,济南 250022

山东恒元半导体科技有限公司,济南 271100

山东大学晶体材料国家重点实验室,济南 250100

铌酸锂 8英寸 自然对流 提拉法 折射率脉理

山东省自然科学基金重大基础研究项目国家自然科学基金山东省高等学校青创团队计划中央引导地方科技发展专项

ZR2021ZD2051802113YDZX2022074

2024

人工晶体学报
中材人工晶体研究院

人工晶体学报

CSTPCD北大核心
影响因子:0.554
ISSN:1000-985X
年,卷(期):2024.53(3)
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