适温离子交换掺铒铌酸锂薄膜的制备研究
Study on Fabrication of Erbium-Doped Lithium Niobate Thin Film Based on Low Temperature Ion Exchange Method
何雨轩 1吴江威 1陈玉萍 2陈险峰3
作者信息
- 1. 上海交通大学物理与天文学院,区域光纤通信网与新型光通信系统国家重点实验室,上海 200240
- 2. 上海交通大学物理与天文学院,区域光纤通信网与新型光通信系统国家重点实验室,上海 200240;宁夏大学物理学院,银川 750021
- 3. 上海交通大学物理与天文学院,区域光纤通信网与新型光通信系统国家重点实验室,上海 200240;山东师范大学,光场调控及应用协同创新中心,济南 250358;上海量子科学研究中心,上海 201315
- 折叠
摘要
本文通过制备KNO3和Er(NO3)3熔融混合物,将其与铌酸锂薄膜在高温管式炉中混合进行适温热扩散,并结合退火工艺,发明了一种直接在铌酸锂薄膜上掺杂Er3+的方法.通过不断变换热扩散温度、掺杂试剂浓度比例和晶体切向等参数,用控制变量法探究了不同参数对适温离子交换法掺杂Er3+效果的影响,在热扩散和退火温度360℃及KNO3和Er(NO3)3质量比25∶1的参数设置下获得了表面形貌较佳的Z切掺铒铌酸锂薄膜.通过飞行时间二次离子质谱仪并利用已知掺杂浓度的薄膜进行定标,检测了所获得的掺铒铌酸锂薄膜中的Er3+浓度情况,对所采用适温离子交换法的有效性进行了验证.这一方法大幅简化了铌酸锂薄膜掺杂的工艺,同时节约了成本,有助于后续在铌酸锂薄膜平台上实现分区掺杂的工作,为未来定制化铌酸锂光子集成平台的搭建提供参考.
Abstract
In this paper,by preparing a molten mixture of KNO3 and Er(NO3)3,mixing it with a thin film lithium niobate in a high-temperature tube furnace for low temperature thermal diffusion,and combining it with an annealing process,a method was invented to directly dope the thin film lithium niobate with Er3+.By continuously changing parameters such as thermal diffusion temperature,doping reagent concentration ratio and crystal tangential direction,the influence of different parameters on the effect of doping Er3+by the low temperature ion exchange method was explored through comparative experiments.When the thermal diffusion and annealing temperature were 360 ℃,and under the parameter setting of KNO3 and Er(NO3)3 mass ratio of 25∶1,a Z-cut erbium-doped thin film lithium niobate with good surface morphology was obtained.The Er3+concentration in the obtained erbium-doped thin film lithium niobate was detected by time-of-flight secondary ion mass spectrometry,which verified the actual effect of the low temperature ion exchange method used.This method greatly simplifies the thin film lithium niobate doping process,while saving costs,and will help to achieve subsequent selectively doping on the thin film lithium niobate platform and provides a viable solution for the construction ofa customized lithium niobate photonic integration platform in the future.
关键词
铌酸锂薄膜/Er3+/适温离子交换/二次离子质谱仪Key words
thin film lithium niobate/Er3+/low temperature ion exchange/secondary ion mass spectrometry引用本文复制引用
基金项目
国家自然科学基金重点项目(12134009)
出版年
2024
国家科技期刊平台
NSTL
万方数据